Development of the SC-RTA Process for Fabrication of Sol-Gel Based Silica-on-Silicon Integrated Optic Components
نویسندگان
چکیده
The SC-RTA process for fabricating silica-on-silicon PLCs from sol-gel glass is described. A wide range of glasses has been deposited, process temperatures have been reduced, and components fabricated by reactive ion etching, reflow and burial of channel guides have shown steadily decreasing loss. Propagation losses are ≈0.2 dB/cm at λ = 1.523μm in a high1n system. Passive components demonstrated include tree-structured power splitters and thermo-optic switches.
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